KLA-Tencor P-15 Profiler

KLA-TENCOR P-15 PROFILER consisting of:
- Model: P-15 Profiler (Upgraded from P11) - Up to 8"/200mm wafer capable - Windows NT - Software Version: Profiler v6.41 - Computer controlled - Measures roughness, waviness, step height, and other surface characteristics - Automatic measurement capability - Measurement of vertical features ranging from under 100Å (0.4 min.) to approximately 300 µm (11 mils), with a vertical resolution of 0.5, 2, or 10Å. - Photo-realistic rendering of the scan data in three dimensions for extended surface analysis. - A virtually unlimited number of data points per profile guarantee that the horizontal resolution is limited by the stylus radius and not by the number of data points. - Measurement of many roughness and waviness parameters, with user-selectable cutoff filters to isolate roughness and waviness. - Ability to fit and level a scan, allowing accurate step height measurements on curved surfaces. - Ability to detect the edge or apex of a profile feature, allowing automated data analysis relative to the feature. - Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements. - S/N: 08960144R - Available for Full Inspection and Demonstration! - 6 Months Warranty on Parts and Labor (Stylus is not covered under warranty)
KLA-Tencor P-15 can profile a variety of materials including:
- Semiconductor wafers - Thin-film heads - Precision-machined and polished surfaces - Ceramics for micro-electronics - Glass for flat panel displays - Optical surfaces