KLA-Tencor Prometrix RS-75 Four Point Probe System
OEM Part #:
OEM Name:
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Product Details:
KLA-TENCOR PROMETRIX RS75 FOUR POINT PROBE SYSTEM consisting of:
- Model: RS-75
- Four Point Probe System
- Up to 200 mm wafers
- One second per site overall measurement speed
- A 49-site contour map with temperature compensation can be achieved on a manually loaded test wafer in less than sixty seconds.
- Provides precise sheet resistance measurements for monitor wafers, with significantly improved speed over existing systems.
- Ideal for a wide range of semiconductor process monitoring applications such as ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP and bulk silicon.
- Displays include contour maps, 3-D plots, and
diameter scans
- Refurbished to Excellent Condition.
- Operator Manual for Prometrix RS75 System.
Condition:
3 Month Warranty.
30 Day Right of Return.
Description:
KLA-Tencor Prometrix RS75 Four Point Probe System.
