KLA-Tencor Prometrix UV-1050 Thin Film Measurement System
OEM Name:
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Product Details:
KLA-TENCOR UV-1050 THIN FILM MEASUREMENT SYSTEM consisting of:
- Model: Prometrix UV-1050
- Thin film measurement tool
- Broadband UV optics
- Dual beam spectrophotometry
- Wafer sizes: 100mm, 150mm, and 200mm
- Stage resolution: xy - 0.25µm, z - 0.025µm
- Focus: Automatic focus on measurement site
- Source: Broadband Xenon Arc Lamp
- Imaging System: Color Camera
- Applications include polysilicon, UV reflectivity, and simultaneous oxide and TiN thickness for CMP applications
- Windows NT
- Summit Software with GUI
- Simultaneous multilayer and ESML measures over 500 discrete wavelengths
- Operations Manual for UV-1050
Condition:
Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
As-Is / Where-Is Pricing is Also Available!
Description:
KLA-Tencor UV-1050 Thin Film Measurement System.
