KLA-Tencor SP1 TBI Unpatterned Surface Inspection System
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Product Details:
KLA-TENCOR SP1 TBI UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:
- Brooks Single 200/300mm FOUP - Inquire about Handler Options for Various Size Wafers - Unpatterned Surface Inspection System - Wafer Measurement Module - Triple Beam Illumination (TBI) - Normal Illumination- 0.079 Defect Sensitivity - Oblique Illumination- 0.060 Defect Sensitivity - Includes DB Enhancement Option - Includes GEM/SECS (Comm Port) Option - Includes GEM/SECS (HSMS) Option - Includes XY Coordinates Option - Blower Box - 2009 Vintage
KLA-TENCOR SURFSCAN SP1 REFURBISHMENT PROCESS consists of:
- Replace used Laser with New Laser - Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required - Replace used Power Supply, as required - Replacement or repair of any bad circuit board. - Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed. - Optics assemblies cleaned and aligned to meet performance specifications or replaced as needed - Electronic assemblies tested to meet performance specifications or replaced as needed - Puck assembly rebuilt or replaced (if applicable) - Replace old monitor with Brand New LCD Monitor - Calibrate system using calibration wafers - Machine covers are cleaned, polished, or replaced, as needed - Performance specifications returned to original factory specifications - Machine is fully tested to verify compliance to OEM specifications - System transport locks installed; system prepared for shipment
Condition:
Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
As-Is/Where-Is Pricing is also available!
Description:
KLA-Tencor SP1 TBI Unpatterned Surface Inspection System.
