KLA-Tencor Surfscan 5500 Inspection System
OEM Part #:
Surfscan 5500
OEM Name:
KLA-Tencor
ID #:
4568
Product Details:
KLA-Tencor Surfscan 5500 Inspection System consisting of:
- Model 5500 Main System
- Can handle from 2" up to 8"/200mm wafers
- Submicron sensitivity, detects 0.2 micron particles
- Surface haze detected as low as 0.3 ppm.
- Handles high scattering surfaces such as metals, polysilicon and cvd films.
- Map locations and size available for each particle.
- Fully refurbished to meet original Surfscan 5500 specifications
- Operations Manual for KLA Surfscan 5500
Condition:
Used
Condition:
As-Is / Where-Is Condition.
Description:
KLA-Tencor Surfcan 5500 Inspection System
Additional Questions:
Contact: sales@classoneequipment.com
