KLA Tencor Surfscan 6200 Particle Inspection System
OEM Part #:
Surfscan 6200
OEM Name:
KLA-Tencor
ID #:
5057
Product Details:
KLA-TENCOR SURFSCAN 6200 PARTICLE INSPECTION SYSTEM consisting of:
- Model: 6200 Surfscan
- Particle Inspection System
- Max Wafer Capable: 8”/200mm
- System configured for 8“/200mm wafers
- Defect Sensitivity: 0.12um
- Defect Map and Histogram with Zoom
- Haze Map and Histogram with Zoom
- Argon Ion Laser (488nm)
- 2D Signal Integration
- Software:
+ Microsoft Windows 98, Version 4.2
- Pentium Computer
- Software Capable for Wafer Map and Histogram
- Parallel Printer Port
- Blower Box
- Operations Manual and Documentation
- Power Supply will fit to the Customer Location
- System transport locks installed; system prepared for shipment
Condition:
Tested
Condition:
System is fully functional, and being sold As-Is condition.
Description:
KLA-Tencor Surfscan 6200 Particle Inspection System.
Additional Questions:
Contact: sales@classoneequipment.com
