KLA-Tencor Surfscan 6420 Particle Inspection System
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Product Details:
KLA-TENCOR SURFSCAN 6420 PARTICLE INSPECTION SYSTEM consisting of:
- Model: Surfscan 6420
- Particle inspection system
- Substrate/Sizes: 2", 3", 4", 6" and 8" Wafer Capable
- Substrate Thickness: Adjustable up to 12 mm.
- Material: any surface that scatters less than 90% of incident light
- Cassette Handling: Single puck handling from single cassette or platform.
- Defect Sensitivity: Most Surfaces: Better than 0.12 um (depending upon surface quality).
- Defect Sensitivity: Polished Silicon: Better than 0.12 um at 95% capture rate.
- Illumination Source: 30 mW Argon-Ion laser, 488 nm wavelength
- Operating Software: Windows 98 Operating Software
- Operations Manual and Documentation
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Condition:
Condition:
As-Is / Where-Is Condition.
Description:
KLA-Tencor Surfscan 6420 Particle Inspection System.
