KLA-Tencor Surfscan SP1 DLS Unpatterned Surface Inspection System
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KLA-TENCOR SURFSCAN SP1 DLS UNPATTERNED SURFACE INSPECTION
SYSTEM consisting of:
- Model: SP1 DLS with 300mm Single FOUP/FIMS Handler (other handlers available)
- Currently Configured for 200/300mm Wafers
- Unpatterned Surface Inspection System
- 0.050um Defect Sensitivity on Polished Bare Silicon
- Enhanced Rough Film Sensitivity
- Argon Ion Laser (488nm)
- Defect Map and Histogram with Zoom
- RTDC (Real Time Defect Classification)
- Map to Map
- Operator Interface
- Blower Unit
*ClassOne Equipment will use standard Polystrene Sphere (PSL) Test Wafers for Acceptance Testing. It is recommended that the Customer purchase one or multiple PSL Test Wafers for on-going Sensitivity Testing.*
KLA-TENCOR SURFSCAN SP1 REFURBISHMENT PROCESS consists of:
- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or
replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as
needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System transport locks installed; system prepared for shipment
Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
As-Is/Where-Is Pricing is Also Available.
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