Suss | MA6/MA8 4in/100mm BSA Chuck for 3mm Thick Wafers
OEM Part #:
NA
OEM Name:
Suss
ID #:
KS1199
Condition:
Tested
Description:
- 4-inch/100mm BSA Vacuum Contact Chuck for 3mm (+/- 0.5mm) Thick Wafers. - Found on Karl Suss MA6 Mask Aligner and Karl Suss MA8 Mask Aligner systems. - Back Side Alignment (BSA). - Can be used for Soft, Hard, Proximity, and Vacuum Contact applications. - Please contact us for all your Suss chuck and maskholder needs (we have many available for sale)!
Additional Questions:
Contact: parts@classoneequipment.com
