KLA-Tencor | 6in/150mm .204nm Wafer Calibration Standard (PSL)

- 6 inch/150mm Wafer Calibration Standard. - Certified Full Deposition, .204nm nominal PSL diameter. - Used on KLA-Tencor Surfscan 6400 and 6420 Defect Inspection Systems. - Used on KLA-Tencor AIT I and AIT II Patterned Surface Defect Inspection Systems. - Used on KLA-Tencor Surfscan SP1 Surface Inspection Systems. - Please contact us for all your KLA-Tencor Polystyrene Latex Spheres (PSL) NIST-Traceable and Non-NIST calibration wafer needs.