M TEK 4300TS Single Chamber SRD With Cabinet
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Product Details:
M TEK 4300TS SINGLE CHAMBER SRD WITH CABINET consisting of:
- Model: 4300TS - System will accommodate up to 8" wafers in high profile cassettes, or 12" wafers in a custom low profile carrier - Dual Stack Front-Loading Spin Rinse Dryer (SRD) - 7" Touch Screen with State-of-the-art Rockwell Programmable Logic Controller - Enhanced Security Password and User Level Features - Single Screen System View and Individual Chamber Operational Status View - Recipe Set-Up Using Simple Touchscreen Selection Accommodating up to 48 User definable Recipes - I/O Mode Allows for Easy Functionality and Troubleshoot Testing - Data Logging Records Process Recipes and ErrorsDuring Cycles - SRD Process Status Lights with Audio Alarm (Idle, Process and Alarms) - End of Process Alarm – User-definable ON/OFF and time duration - Auto Rinse Cycle (User Programmable) - Programmable N2 Economizer - Saves valuable N2 loss when tool is idle - Single Screen I/O - (Qty 1) New Rotor configured to customer specifications - Non-Contact Labyrinth Rear Bowl Shaft Seal - Brushless Motors with Motor Controllers - Resistivity Monitor - Static Eliminator Assembly - RA10 Bowl Finish - EMO, Front location - Vibration Dampeners - DI Water Recirculation - Rotor Stop Positioner - Viton Seals (doors, rear bowl) - Process Tubing with Color Coded Pneumatic Lines - Programmable Auto Cycle - Acrylic Universal Window - Polypropylene Cabinet “Aero Style” - Input Voltage: 120V or 220V per customer specification - CE Certificate - Manufactured and Qualified with 17 meg Ohm DI water and class 1 N2 - Guaranteed Particle counts< 30 at 0.3 micron - Complete Documentation Package
Condition:
Condition:
Brand New, 6 Month Warranty!
Description:
M TEK 4300TS Single Chamber SRD With Cabinet