Novellus / LAM Sabre XT Plating Tool
OEM Name:
Novellus / LAM
ID #:
5022
Product Details:
NOVELLUS / LAM SABRE XT PLATING TOOL consisting of:
- Manufacturer: Novellus / LAM
- Model: Sabre XT
- 3 open cassette load stations
- 5 anneal chambers
- 3 Electrofill Cells (Plating Cells)
- 3 Post Electrofill Cells (could be post electrofill modules (PEMs) with EBR hardware)
- System does not have hard drives installed
Condition:
Used
Condition:
As-Is / Where-Is Condition.
Description:
Novellus / LAM Sabre XT Plating Tool
Additional Questions:
Contact: sales@classoneequipment.com
