• Brand-
    New
    Tools
      • Takano <200mm Particle Inspection
      • Takano <300mm Particle Inspection
      • ClassOne Solstice Advanced Electroplating
  • Like-New
    Refurbished
    Tools
      • YES Ovens
      • SUSS Mask Aligners
      • EVG Mask Aligners
      • Oxford & Plasma-Therm for RIE, ICP & PECVD
      • KLA-Tencor Wafer Inspection & Metrology
  • Quality
    Pre-owned
    Tools
      • Sell or Trade Your Equipment
  • Spare Parts
    Repairs & Upgrades
    Field Support
      • Thousands of Parts
      • Repairs, Upgrades & Refurbishments
        • Semitool Lift-Rotates
        • Semitool Robots
        • YES Ovens PLC Upgrades
      • Field Service Support
  • Find Tools
  • Find Parts
  • About Us
      • Company
      • News
      • Videos
      • Contact Us
      • Inquiry Form
  • My RFQ
  • Home
  • -
  • Oxford | 6-MD91B32590, 6in Wafer Clamp Assy w/ Quartz & Ring

Oxford | 6-MD91B32590, 6in Wafer Clamp Assy w/ Quartz & Ring

OEM Part #:

6-MD91B32590

OEM Name:

Oxford

ID #:

OF1025

Condition:

Tested

Description:

- 6 inch Wafer Clamp Assy w/ Quartz and Ring. - Found on Oxford 100 and 133 systems. - Please contact us for all your Oxford part needs!

Additional Questions:

Contact: parts@classoneequipment.com

You may also like

  • SPTS | 1123680, Quadrant Clamp Support Ring
  • SPTS | 112550D01, Quadrant Clamp Sectors (4 Per Tool)
  • Suss | 1023248, Complete Spacer/Clamp mechanism
  • Oxford | Service for Oxford Plasma Etchers & PECVD Systems
Back to Top
  • Popular Refurbished Brands

  • YES (Yield Engineering Systems)
  • SUSS and EVG
  • ...

  • Oxford, Plasma-Therm, SPTS
  • KLA-Tencor
  • About Us

  • Company
  • Contact Us
  • Inquiry Form
  • . . .

  • News
  • Videos
  • Careers
© 2026 ClassOne Equipment, All rights reserved.