Oxford Plasmalab 100 ICP System
OEM Part #:
Plasmalab 100 ICP
OEM Name:
Oxford
ID #:
4602
Product Details:
OXFORD PLASMALAB 100 ICP ETCHER consisting of:
- Model: Plasmalab 100 ICP
- Inductive Coupled Plasma Source (ICP380)
- Max wafer size: 8"/200m diameter (8" platen)
- X-20 PLC Controller
- New Windows 10 PC
- Cryo Table Option Equipped (-150C to +400C)
- Mechanical Wafer Clamping
- Backside Helium Cooling
- Load-locked single chamber (ICP)
- Alcatel Maglev Turbo Pump (Chamber)
- Alcatel Turbo Pump (Load Lock)
- Alcatel ACT Controller
- Computer (see note below)
- LCD Monitor, Keyboard, and Mouse
- Load Lock Rough Pump
- Chamber Rough Pump
- Six Channel Gas Box
- Operations Manual and Documentation
- Offered as Fully Refurbished and Meeting Original Specifications.
REFURBISHED TO MEET OEM SPECIFICATIONS consisting of:
- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.
- Model: Plasmalab 100 ICP
- Inductive Coupled Plasma Source (ICP380)
- Max wafer size: 8"/200m diameter (8" platen)
- X-20 PLC Controller
- New Windows 10 PC
- Cryo Table Option Equipped (-150C to +400C)
- Mechanical Wafer Clamping
- Backside Helium Cooling
- Load-locked single chamber (ICP)
- Alcatel Maglev Turbo Pump (Chamber)
- Alcatel Turbo Pump (Load Lock)
- Alcatel ACT Controller
- Computer (see note below)
- LCD Monitor, Keyboard, and Mouse
- Load Lock Rough Pump
- Chamber Rough Pump
- Six Channel Gas Box
- Operations Manual and Documentation
- Offered as Fully Refurbished and Meeting Original Specifications.
REFURBISHED TO MEET OEM SPECIFICATIONS consisting of:
- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.
Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
Description:
Oxford Plasmlab 100 ICP Etcher.
Additional Questions:
Contact: sales@classoneequipment.com
