Oxford Plasmalab 80 Plus PECVD System
OEM Part #:
Plasmalab 80 Plus PECVD
OEM Name:
Oxford
ID #:
5115
Product Details:
OXFORD PLASMALAB 80 PLUS PECVD consisting of:
- Model: Plasmalab 80 Plus - Single PECVD chamber, non load-locked - Heated Platen up to 400 C - Max Wafer Size 200mm - PC2000 Software - Optical End Point Detector - Black PLC - 500W RF Generator - Edwards IQDP Vacuum Pump & Blower - Six Channel Gas Box - Operations Manual and Documentation Gas Lines Currently Configured For: CF4/O2 NH3 N2O SiH4 N2Condition:
Refurbished
Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
Description:
Oxford Plasmalab 80 Plus PECVD System
Additional Questions:
Contact: sales@classoneequipment.com
