Rudolph NSX-115 Advanced Wafer Inspection

Rudolph NSX-115 Advanced Wafer Inspection consisting of: 

- Model: NSX-115
- Ultra port quick change top plate & film frame quick change top plate
- Ultra port 50/50:

   - Loadport A is for film frame for 6&8” filmframes
   - Loadport B is 300mm Porta 300 configured with a cassette adapter box capable of 
   - loading 6 & 8” cassettes
   - Robot has both a film frame gripper and wafer end effector (quick change)
   - 2 pre-aligners (wafer / film frame)
   - 2 scanners (wafer / film frame)

- Genmark Gencobot 8/2L
- PC (Windows XP) 
- Objectives: 1x, 2x, 5x, 10x, 20x
- Worm screw for Y
- Linear for X
- NSK controller with encoder strip
- Laser focus sensor
- Toshiba for color review camera
- Basler inspection camera
- Ionizer
- Inker
- Ring light (dark field)
- 1 Odessy main board
- 3 Node boards
- Matrox image capture computer
- SN: UP1254