Semitool Sirius System
OEM Part #:
Sirius HydrOzone
OEM Name:
Semitool
ID #:
4405
Product Details:
SEMITOOL SIRIUS HYDROZONE SYSTEM consisting of:
- Model: Sirius HydrOzone
- Wafer Size: 150mm & 200mm wafer capable
- Process: DI water/ozone
- Rinse: DI water with ammonium hydroxide
- Dry: N2
- Spray processing chamber.
- Uses a minimal amount of deionized water and ozone
- Low cost, low environmental impact process used for photoresist stripping, photolithography rework and organic cleans
- Does not require the use of sulfuric acid with its related delivery and disposal costs
- Manufacturer Serial #: 222078
- Year of Manufacture: 2004
- Model: Sirius HydrOzone
- Wafer Size: 150mm & 200mm wafer capable
- Process: DI water/ozone
- Rinse: DI water with ammonium hydroxide
- Dry: N2
- Spray processing chamber.
- Uses a minimal amount of deionized water and ozone
- Low cost, low environmental impact process used for photoresist stripping, photolithography rework and organic cleans
- Does not require the use of sulfuric acid with its related delivery and disposal costs
- Manufacturer Serial #: 222078
- Year of Manufacture: 2004
Condition:
Used
Condition:
As-Is / Where-Is Condition.
Description:
Semitool Sirius HydrOzone System.
Additional Questions:
Contact: sales@classoneequipment.com
