Suss MA150cc Mask Aligner

SUSS MA150CC MASK ALIGNER consisting of:
- Model: MA150cc - Manufacturer: Suss MicroTec / Karl Suss - Topside and Backside Alignment - DVM6 microscope - Objectives: 5X, 10X - BSA Microscope set WD56 - Lamp house 350W (10-15mW/cm² @ 365nm) - Optics UV400 for W150 - CIC500 - Computer: MS DOS - Touchscreen: 10.1" VGA - Videosystem: DVCU Box - Substrate transport: W100-150 even - Pre-Aligner: XPAL, LWL sensor - Cassette Stations: Standard, reflective - Mask holder: W150/M7x7/Prox - Chuck: W150/BSA - Capable of Hard, Soft, and Vacuum Contact Exposure Modes - Operations Manual for Suss MA150 - Refurbished to Meet Original Suss MA150 Mask Aligner Specifications
CLASSONE'S MASK ALIGNER REFURBISHMENT PROCESS consists of:
1) Main System Body: - Ellipsoidal Mirror Replaced with New - UV Bulb Replaced with New - Cold Light Mirror Inspected & Replaced as Needed - Front Turning Mirror Inspected & Replaced as Needed - Front Lens Inspected & Replaced as Needed - Shutter Cylinders Replaced with New - Mirror House Cylinder Replaced with New - Lamp Power Supply Tested & Repaired or Replaced as Needed - Exposure Optics Tested - Microscope Illumination Bulbs Replaced with New - Microscope Assembly Inspected and Adjusted as Needed - Full Optical Alignment of Microscope Performed as Needed - Machine is Fully Tested to Verify Compliance to Original Specifications - WEC Head Rebuilt - Pneumatic Regulators Inspected & Replaced as Needed - Machine Covers are Repainted or Replaced as Needed
2) Isolation Table: - Isolation Table Air Bags Inspected & Replaced as Needed - Pneumatic Regulators Inspected & Replaced as Needed - Air lines Inspected & Replaced as Needed - Wheels Inspected & Replaced as Needed - Leveling Feet Inspected & Replaced as Needed
3) If Applicable: - Transport Slide Rebuilt - Pre-Aligner Assembly Rebuilt - Wafer Alignment Stage Rebuilt - Cassette Elevator Rebuilt
INSTALLATION AND SUPPORT WORLDWIDE OF SUSS MASK ALIGNERS:
- ClassOne Supports all its Used and Refurbished Suss Mask Aligners with Spare Parts and Service Worldwide - Installation & Training Available Worldwide