Karl Suss MA8/BA6 Mask Aligner

Karl Suss MA8/BA6 Mask Aligner consisting of:
- Model: MA8/BA6 - Configured for Topside Alignment (TSA) - Suss DVM8 Microscope (Dual Video Microscope) - Objectives: 5x, 10x, 20x - Power: 230V, 50/60 Hz - UV400 Optics (for 365nm and 405nm exposure) - Suss CIC 1000 Power Supply - Capable of Hard, Soft, Vacuum, and Proximity Contact - 1000W Lamphouse - Anti-Vibration Table - Vacuum chuck: 6“ wafer chuck included (other sizes available) - Maskholder: 7” included (other sizes available) - Vintage: 2000 - Serial Number: 570 - Operations Manual and Documentation
CLASSONE'S MASK ALIGNER REFURBISHMENT PROCESS consists of:
1) Main System Body:
- Ellipsoidal Mirror Replaced with New - UV Bulb Replaced with New - Cold Light Mirror Inspected & Replaced as Needed - Front Turning Mirror Inspected & Replaced as Needed - Front Lens Inspected & Replaced as Needed - Shutter Cylinders Replaced with New - Mirror House Cylinder Replaced with New - Lamp Power Supply Tested & Repaired or Replaced as Needed - Exposure Optics Tested - Microscope Illumination Bulbs Replaced with New - Microscope Assembly Inspected and Adjusted as Needed - Full Optical Alignment of Microscope Performed as Needed - Machine is Fully Tested to Verify Compliance to Original Specifications - WEC Head Rebuilt - Pneumatic Regulators Inspected & Replaced as Needed - Machine Covers are Repainted or Replaced as Needed
2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed - Pneumatic Regulators Inspected & Replaced as Needed - Air lines Inspected & Replaced as Needed - Wheels Inspected & Replaced as Needed - Leveling Feet Inspected & Replaced as Needed
3) If Applicable:
- Transport Slide Rebuilt - Pre-Aligner Assembly Rebuilt - Wafer Alignment Stage Rebuilt - Cassette Elevator Rebuilt