Tepla 600 Semi-Automatic Plasma Asher
OEM Part #:
600 Semi-Automatic Plasma Etcher
OEM Name:
Tepla
ID #:
4531
Product Details:
TEPLA 600 PLASMA ASHER consisting of:
- Model: 600 SemiAuto
- Semi-Automatic RF Plasma System
- Can process up to 150mm wafers
- Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
- Chamber Size: 245mm diameter, 380mm depth
- Chamber Material: ceramic
- ENI RF Generator: 0-600 Watt, 13.56 MHz
- Gases: 4 channels controlled by 4 MFCs
- MFCs: 3 Brooks 5850 MFCs (professional rebuilt and calibrated)
- MFCs: 1 UNIT UFC-8101 MFCs (professional rebuilt and calibrated)
- Computer: on-board, single card computer
- RS232 interface
- Software: up to 100 programs of 5 steps each can be entered
- Emergency Stop (EMO)
- Leybold D65B Vacuum Pump or equivalent (professionally rebuilt)
- Quartz 4" 25 slot cassette
- Quartz 6" 25 slot cassette
- Dimensions: 740mm x 624mm x 701mm + connections
- Weight: 135 kg (approximate)
- Electrical: 230V, 50/60Hz, 15A, 2kW
- Manufactured in 2003.
- System Refurbishment Includes: New Quartz Chamber, New Magnetron, All Consumables (O-Rings, Seals) Replaced, MFCs Rebuilt and Calibrated, Vacuum Pump Rebuilt, and more.
The Tepla 600 Semi-Auto Plasma System is used for the following processes among others:
- Photoresist stripping
- Surface cleaning after storage
- Surface cleaning after processes using oil pump or diffusion pump vacuum
- Surface cleaning as part of photolithography after wet developing
- Stripping of photoresist layers after etching
- Removal of organic passivating layers and masks
- Etching of glass and ceramic
- Etching of SiO2, Si3N4, Si
- Removal of polyimide layers.
- Model: 600 SemiAuto
- Semi-Automatic RF Plasma System
- Can process up to 150mm wafers
- Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
- Chamber Size: 245mm diameter, 380mm depth
- Chamber Material: ceramic
- ENI RF Generator: 0-600 Watt, 13.56 MHz
- Gases: 4 channels controlled by 4 MFCs
- MFCs: 3 Brooks 5850 MFCs (professional rebuilt and calibrated)
- MFCs: 1 UNIT UFC-8101 MFCs (professional rebuilt and calibrated)
- Computer: on-board, single card computer
- RS232 interface
- Software: up to 100 programs of 5 steps each can be entered
- Emergency Stop (EMO)
- Leybold D65B Vacuum Pump or equivalent (professionally rebuilt)
- Quartz 4" 25 slot cassette
- Quartz 6" 25 slot cassette
- Dimensions: 740mm x 624mm x 701mm + connections
- Weight: 135 kg (approximate)
- Electrical: 230V, 50/60Hz, 15A, 2kW
- Manufactured in 2003.
- System Refurbishment Includes: New Quartz Chamber, New Magnetron, All Consumables (O-Rings, Seals) Replaced, MFCs Rebuilt and Calibrated, Vacuum Pump Rebuilt, and more.
The Tepla 600 Semi-Auto Plasma System is used for the following processes among others:
- Photoresist stripping
- Surface cleaning after storage
- Surface cleaning after processes using oil pump or diffusion pump vacuum
- Surface cleaning as part of photolithography after wet developing
- Stripping of photoresist layers after etching
- Removal of organic passivating layers and masks
- Etching of glass and ceramic
- Etching of SiO2, Si3N4, Si
- Removal of polyimide layers.
Condition:
Refurbished
Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
Description:
Tepla 600 Semi-Automatic RF Plasma Asher.
Additional Questions:
Contact: sales@classoneequipment.com
