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Veeco Lancer Ion Beam Etch System (IBE)

OEM Part #:

Lancer (IBE)

OEM Name:

Veeco

ID #:

5080

Product Details:

Veeco Lancer Ion Beam Etch System (IBE) consisting of:
- Model: Lancer - Currently configured for 150mm (change kit for 200mm included) - Vintage: 2019 - Used Minimally for R&D & Light Production - System PC & Hard Drives - NOVUS Ion Source Controller - Process Kits Professionally Cleaned - System has been Professionally Decontaminated - SN: 42898
Gas Configuration:
- CHF3 - HPN2 - NF3 - H2 - SF6 - CF4

Condition:

Used

Condition:

Operational, installed in fab.

Being Sold in As-Is / Where-Is Condition.

Description:

Veeco Lancer Ion Beam Etch System (IBE).

Additional Questions: