Takano Particle Detection System Delivered to EUV Tech
Said Hettermann, “A key factor in our selecting the new 300mm Takano WM-10 system was its very high-sensitivity particle detection. For us, particle sensitivity is critical because we are using the new Takano tool to validate the cleanliness of the equipment we build – which are some of the most advanced EUV and soft-x-ray systems in the industry.”
“We have the new WM-10 running in our fab in Martinez, California,” added Hettermann. “And we’re already seeing the outstanding performance it delivers – routinely detecting particles down to 48nm. Plus, it’s configured to handle not only 300mm wafers but also 200mm and 150mm.”
Pawlak pointed out that Takano-brand particle detection systems are among the top-selling new tools in ClassOne Equipment’s product lineup. Along with best-in-class detection sensitivity, the Takano equipment provides high throughput, repeatability, and reliability, plus a suite of options. And very importantly, the systems are attractively priced and readily available. These are also some of the reasons why Takano is becoming the new-technology replacement-of-choice for legacy Surfscan® systems, which for many years were an industry “standard” for wafer particle detection.
ClassOne Equipment is the exclusive source for sales, service and complete support of Takano-brand particle detection systems across North America and Europe. ClassOne maintains a team of specially-trained field engineers to provide installations, PMs, and all other services on Takano systems.
In addition to the all-new Takano systems, ClassOne Equipment also offers a broad selection of previously-owned semiconductor equipment, including many tools that are totally refurbished and literally better-than-new. The company also provides thousands of top-quality OEM parts, as well as equipment service, support, warranties, financing, and much more. All may be seen at classoneequipment.com. For further information, contact sales@classoneequipment.com.
About EUV Tech
Founded in 1997 and headquartered in Martinez, California, EUV Tech (euvtech.com) is a global leader in the production of at-wavelength EUV metrology tools. The company supplies leading-edge solutions using extreme ultraviolet and soft x-ray technology to advance the frontiers of semiconductor manufacturing and material science. The company develops and manufactures mask metrology equipment that enables high-volume manufacturing using EUV lithography. Their systems include EUV reflectometers, EUV pellicle tools, EUV phase metrology tools, and EUV mask imaging tools.