TEL ALPHA-8SEi FTP-SiN FURNACE

TEL ALPHA-8SEi FTP-SiN FURNACE consisting of:
- Maintenance fixture - N2 Load Lock - Temperature Profile Jig - Inner Tube Installation Jig - Fork Pitch Gauge - HCT Heater Installation Jig - CKD Comb-Valve Maintenance Jig - Tube Cart - Single T/C and extension cable - Auto profile T/C - IGS Maintenance Jig - Safety Guard Fixture for back door - Backdoor Remover - Base Unit for FTP-SiN Process Cabinets/Units/Controllers - Furnace Cabinet(I-Type Deep Bay) -Built in SMIF I/O - Power Supply Unit, Control Unit:3-ph 480VAC, 1-ph 120VAC. - Main Controller (WAVES) - Temperature Controller (Model 560) - Heater Type VOS-40-017 500-1000C (FTP Heater) - Rapid Cooling Unit - Cassette and Wafer Handling Automation - Auto Tube Shutter - Boat Elevator with Rotation Function - Boat Elevator CAP for Q'z process tube - Wafer Load Automation - 25 Wafers/6inch Conversion Cassette - 21 Cassette Loading Automation - Cassette model: Entegris KXTC150-0 200-97C02 - SMIF POD Model: Entegris M200-5114 - 6inch Si/Glass Wafer Handling Capability
SiN Process:
- Integrated Gas System for F-Poly Process - 2 NH3 Gas Line (with N2 purge line) - 1 DCS Gas Line (with N2 purge line) - 3 N2 Gas Line - 2 Pure N2 Gas Line - 1 N2 line for boat rotation