EVG

EVG | BM620046C, Wafer Chuck 150mm Manual

Manufacturer
OEM Part #
Description
ID #EV1439
Condition

EVG | CBM620103A001, Mask Holder 7" for Flat Alignment

Manufacturer
OEM Part #
Description
ID #EV1438
Condition

EVG | BM620103A, Mask Holder 7"

Manufacturer
OEM Part #
Description
ID #EV1437
Condition
EVG | 62x & 62xx Clamping Tube Plug 2

EVG | 62x & 62xx Clamping Tube Plug 2

Manufacturer
OEM Part #
Description
ID #EV1436
Condition
EVG | 62x & 62xx Clamping Tube Plug 1

EVG | 62x & 62xx Clamping Tube Plug 1

Manufacturer
OEM Part #
Description
ID #EV1435
Condition
EVG | 6200 150mm Chuck

EVG | 6200 150mm Chuck

Manufacturer
OEM Part #
Description
ID #EV1434
Condition
EVG | BM620242B, 6200 7" Mask Load Frame

EVG | BM620242B, 6200 7" Mask Load Frame

Manufacturer
OEM Part #
Description
ID #EV1433
Condition
EVG | BM620216A, 6200 7" Mask Holder

EVG | BM620216A, 6200 7" Mask Holder

Manufacturer
OEM Part #
Description
ID #EV1432
Condition
EVG | 10003686, Illumination LED Lamp (Green)

EVG | 10003686, Illumination LED Lamp (Green)

Manufacturer
OEM Part #
Description
ID #EV1431
Condition

EVG | SP6200175, 4in Segment Exposure Tool

Manufacturer
OEM Part #
Description
ID #EV1430
Condition
EVG | Jenny Science AC/DC 50V4 Servo Controller

EVG | Jenny Science AC/DC 50V4 Servo Controller

Manufacturer
OEM Part #
Description
ID #EV1429
Condition

EVG | Z0651050, 6in/150mm Quartz Pressure Insert

Manufacturer
OEM Part #
Description
ID #EV1428
Condition

EVG | 20X/0.35 Objective

Manufacturer
OEM Part #
Description
ID #EV1120
Condition

Olympus | 10010422, 10x Objective (10x/0.25 LMPlanFl)

Manufacturer
OEM Part #
Description
ID #EV1050
Condition

EVG | Camera Motor Coupling

Manufacturer
OEM Part #
Description
ID #EV1427
Condition

EVG | SP6200005A, Backside Camera Assembly (Right)

Manufacturer
OEM Part #
Description
ID #EV1426
Condition

EVG | SP6200004A, Backside Camera Assembly (Left)

Manufacturer
OEM Part #
Description
ID #EV1425
Condition

EVG | Top Chuck Clip for EVG 520 Bonder

Manufacturer
OEM Part #
Description
ID #EV1424
Condition

EVG | Lid Sensor for EVG 520 Bonder

Manufacturer
OEM Part #
Description
ID #EV1422
Condition

EVG | Integrator Sensor

Manufacturer
OEM Part #
Description
ID #EV1421
Condition

EVG | Z030589, 350W Standoff / Lamp Socket

Manufacturer
OEM Part #
Description
ID #EV1420
Condition

EVG | EL640020A, RPS 2110C2-E Lamphouse 1000W Power Supply

Manufacturer
OEM Part #
Description
ID #EV1419
Condition

EVG | Chuck Wafer Retainer w/ Screw

Manufacturer
OEM Part #
Description
ID #EV1418
Condition

EVG | SP6400007, Lamp Shutter Assy 350-500W

Manufacturer
OEM Part #
Description
ID #EV1417
Condition