Defect Inspection

KLA-Tencor AIT I Patterned Surface Defect Inspection System

Manufacturer
OEM Part #
Description
ID #4933
Condition

August Robot Wafer Handler Model QA-MDI-02

Manufacturer
OEM Part #
Description
ID #4901
Condition

Rudolph / August NSX-95 Automated Defect Inspection

Manufacturer
OEM Part #
Description
ID #4763
Condition

KLA-Tencor AIT II Patterned Surface Defect Inspection System

Manufacturer
OEM Part #
Description
ID #4007
Condition