SP1

KLA-Tencor | 536091, Beam Splitter Cube, BF-DF

Manufacturer
OEM Part #
Description
ID #KT1836
Condition

KLA-Tencor | 0283214-000, Beam Splitter Cube Assembly

Manufacturer
OEM Part #
Description
ID #KT1799
Condition

KLA-Tencor | 330710, Robot Interface PCB

Manufacturer
OEM Part #
Description
ID #KT1798
Condition

KLA-Tencor | 0023965-004, Assy, Chuck, 300mm, EHII

Manufacturer
OEM Part #
Description
ID #KT1778
Condition

KLA-Tencor | 522279, Nano Analog Board SP1P

Manufacturer
OEM Part #
Description
ID #KT1777
Condition

KLA-Tencor | 363375, Handler Node Board

Manufacturer
OEM Part #
Description
ID #KT1714
Condition

KLA-Tencor | 285-F01, Spectra-Physics 75mW Power Supply

Manufacturer
OEM Part #
Description
ID #KT1711
Condition

KLA-Tencor | 0060055-001, Dual Ceramic End-Effector

Manufacturer
OEM Part #
Description
ID #KT1693
Condition

KLA-Tencor | 375420, PCB Beam Position Controller

Manufacturer
OEM Part #
Description
ID #KT1643
Condition

KLA-Tencor | 0019328-000, PCLTA-20 Lontalk Adapter

Manufacturer
OEM Part #
Description
ID #KT1642
Condition

KLA-Tencor | 0083729-000, Analog DF Board

Manufacturer
OEM Part #
Description
ID #KT1640
Condition

KLA-Tencor | 000-3014006, GSI Group Mini SECS Servo Board

Manufacturer
OEM Part #
Description
ID #KT1639
Condition

KLA-Tencor | Photomultiplier Tube (PMT)

Manufacturer
OEM Part #
Description
ID #KT1637
Condition

KLA-Tencor | 0064742-000, PCB Power Distribution Assembly

Manufacturer
OEM Part #
Description
ID #KT1634
Condition

KLA-Tencor | Design/Manufacturing Services for End-Effectors

Manufacturer
OEM Part #
Description
ID #KT1629
Condition

KLA-Tencor | Service for KLA-Tencor SP1 Systems

Manufacturer
OEM Part #
Description
ID #KT1628
Condition

KLA-Tencor | Robot Repair/Refurbishment

Manufacturer
OEM Part #
Description
ID #KT1619
Condition

KLA-Tencor | Pre-Aligner Repair/Refurbishment Services

Manufacturer
OEM Part #
Description
ID #KT1618
Condition

KLA-Tencor | 353299, SP1 Spindle Spindle Assembly (TBI Only)

Manufacturer
OEM Part #
Description
ID #KT1613
Condition

KLA-Tencor | 0048209-000, Spindle for SP1 DLS

Manufacturer
OEM Part #
Description
ID #KT1612
Condition

KLA-Tencor | 0023889-000, 150/200mm Vacuum Chuck

Manufacturer
OEM Part #
Description
ID #KT1585
Condition

KLA-Tencor | 0023892-000, 200/300mm Vacuum Chuck

Manufacturer
OEM Part #
Description
ID #KT1584
Condition

KLA-Tencor | 0068627-000, Ceramic End Effector

Manufacturer
OEM Part #
Description
ID #KT1582
Condition

KLA-Tencor | 90X0054, LCD Monitor

Manufacturer
OEM Part #
Description
ID #KT1572
Condition